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Realizing suspended structures on chips fabricated by CMOS foundry processes through the MOSIS service

by: Marshall, J.; Gaitan, M.; Zaghloul, M.; Novotny, D.; Tyree, V.; Pi, J. -I.; Piñá, C.; Hansford, W.

Publication date: 1994-06-01

Publisher: National Bureau of Standards

Collection: nistir; NISTresearchlibrary; fedlink; americana

Digitizing sponsor: NIST Research Library

Contributor: NIST Research Library

Language: English

Volume: NISTIR 5402

Notes

No copyright page found.

Addeddate: 2017-03-28 19:09:03

Bib_id: nistir5402

Box: box_6

Call number: QC100 .U56 no.5402 1994

Camera: Canon EOS 5D Mark II

Copyright: Public Domain

Copyright_message: NIST interagency report is a publication of the U.S. Government. The papers are in the public domain and are not subject to copyright in the United States. However, please pay special attention to the individual works to make sure there are no copyright restrictions indicated. Individual works may require securing other permissions from the original copyright holder.

Digital_item: 1

Foldoutcount: 0

Identifier: realizingsuspend5402mars

Identifier-ark: ark:/13960/t2n63vx78

Invoice: 34

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